Measurements and diagnostics of diamond films and coatings
The commercial potential of chemical-vapor-deposited (CVD) diamond films has been established and a number of applications have been identified through university, industry, and government research studies. This paper discusses the methodologies used for property measurement and diagnostic of CVD di...
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| Veröffentlicht in: | Measurement : journal of the International Measurement Confederation 2001-03, Vol.29 (2), p.113-126 |
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| container_title | Measurement : journal of the International Measurement Confederation |
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| creator | Miyoshi, Kazuhisa Wu, Richard L.C |
| description | The commercial potential of chemical-vapor-deposited (CVD) diamond films has been established and a number of applications have been identified through university, industry, and government research studies. This paper discusses the methodologies used for property measurement and diagnostic of CVD diamond films and coatings. Measurement and diagnostic techniques studied include scanning electron microscopy, transmission electron microscopy, atomic force microscopy, stylus profilometry, X-ray diffraction, electron diffraction, Raman spectroscopy, Rutherford backscattering, elastic recoil spectroscopy, and friction examination. Each measurement and diagnostic technique provides unique information. A combination of techniques can provide the technical information required to understand the quality and properties of CVD diamond films, which are important to their application in specific component systems and environments. In this study the combination of measurement and diagnostic techniques was successfully applied to correlate deposition parameters and resultant diamond film composition, crystallinity, grain size, surface roughness, and coefficient of friction. |
| doi_str_mv | 10.1016/S0263-2241(00)00032-4 |
| format | Article |
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This paper discusses the methodologies used for property measurement and diagnostic of CVD diamond films and coatings. Measurement and diagnostic techniques studied include scanning electron microscopy, transmission electron microscopy, atomic force microscopy, stylus profilometry, X-ray diffraction, electron diffraction, Raman spectroscopy, Rutherford backscattering, elastic recoil spectroscopy, and friction examination. Each measurement and diagnostic technique provides unique information. A combination of techniques can provide the technical information required to understand the quality and properties of CVD diamond films, which are important to their application in specific component systems and environments. 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In this study the combination of measurement and diagnostic techniques was successfully applied to correlate deposition parameters and resultant diamond film composition, crystallinity, grain size, surface roughness, and coefficient of friction.</description><subject>Chemical-vapor-deposited (CVD) diamond</subject><subject>Diagnostic methodology</subject><subject>Exact sciences and technology</subject><subject>Films and coatings</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Laboratory procedures</subject><subject>Measurement</subject><subject>Metrology</subject><subject>Metrology, measurements and laboratory procedures</subject><subject>Physics</subject><subject>Scanning probe microscopes, components and techniques</subject><subject>Testing and inspecting procedures</subject><subject>Testing, inspecting procedures</subject><subject>X- and γ-ray instruments and techniques</subject><issn>0263-2241</issn><issn>1873-412X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2001</creationdate><recordtype>article</recordtype><recordid>eNqFkE1LAzEQhoMoWKs_QSgIoofVycfuZr2IFL-g4kEFbyFNJiWyu6nJVvDfu-2WXmUOwwzPOy_zEnJK4YoCLa7fgBU8Y0zQC4BLAOAsE3tkRGXJM0HZ5z4Z7ZBDcpTSVw8VvCpG5OYFdVpFbLDt0kS3dmK9XrQhdd6kSXDrsQn92vm6GQATdOfbRTomB07XCU-2fUw-Hu7fp0_Z7PXxeXo3y4ygvMvQOKOpLQsOoHlfSOeMuqLEOaeGSid4qbVEhrqyQopcloZbIy2IykrgfEzOh7vLGL5XmDrV-GSwrnWLYZUUKyRUeSV7MB9AE0NKEZ1aRt_o-KsoqHVSapOUWsegANQmKSV63dnWQCejaxd1a3zaiWUpRJX31O1AYf_rj8eokvHYGrQ-oumUDf4fnz_jj3xu</recordid><startdate>20010301</startdate><enddate>20010301</enddate><creator>Miyoshi, Kazuhisa</creator><creator>Wu, Richard L.C</creator><general>Elsevier Ltd</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>20010301</creationdate><title>Measurements and diagnostics of diamond films and coatings</title><author>Miyoshi, Kazuhisa ; Wu, Richard L.C</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c413t-ecfca1d76300a3a3ae1b21f67eb31c18f437aa8e2ea9d484587c3dc8d049d8033</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2001</creationdate><topic>Chemical-vapor-deposited (CVD) diamond</topic><topic>Diagnostic methodology</topic><topic>Exact sciences and technology</topic><topic>Films and coatings</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Laboratory procedures</topic><topic>Measurement</topic><topic>Metrology</topic><topic>Metrology, measurements and laboratory procedures</topic><topic>Physics</topic><topic>Scanning probe microscopes, components and techniques</topic><topic>Testing and inspecting procedures</topic><topic>Testing, inspecting procedures</topic><topic>X- and γ-ray instruments and techniques</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Miyoshi, Kazuhisa</creatorcontrib><creatorcontrib>Wu, Richard L.C</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Measurement : journal of the International Measurement Confederation</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Miyoshi, Kazuhisa</au><au>Wu, Richard L.C</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Measurements and diagnostics of diamond films and coatings</atitle><jtitle>Measurement : journal of the International Measurement Confederation</jtitle><date>2001-03-01</date><risdate>2001</risdate><volume>29</volume><issue>2</issue><spage>113</spage><epage>126</epage><pages>113-126</pages><issn>0263-2241</issn><eissn>1873-412X</eissn><abstract>The commercial potential of chemical-vapor-deposited (CVD) diamond films has been established and a number of applications have been identified through university, industry, and government research studies. 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| identifier | ISSN: 0263-2241 |
| ispartof | Measurement : journal of the International Measurement Confederation, 2001-03, Vol.29 (2), p.113-126 |
| issn | 0263-2241 1873-412X |
| language | eng |
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| source | Elsevier ScienceDirect Journals Complete |
| subjects | Chemical-vapor-deposited (CVD) diamond Diagnostic methodology Exact sciences and technology Films and coatings Instruments, apparatus, components and techniques common to several branches of physics and astronomy Laboratory procedures Measurement Metrology Metrology, measurements and laboratory procedures Physics Scanning probe microscopes, components and techniques Testing and inspecting procedures Testing, inspecting procedures X- and γ-ray instruments and techniques |
| title | Measurements and diagnostics of diamond films and coatings |
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