Structural studies of ITO thin films with the Rietveld method

Tin doped indium oxide (ITO) films of different tin concentrations were deposited by e-beam evaporation onto glass substrates. These ITO films were investigated using grazing incidence X-ray diffractometry (GIXRD). The application of the Rietveld refinement to GIXRD patterns provides information abo...

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Veröffentlicht in:	Thin solid films 1998-11, Vol.332 (1-2), p.277-281
Hauptverfasser:	QUAAS, M, EGGS, C, WULFF, H
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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