Large area YBa2Cu3O7 and Tl2Ba2CaCu2O8 thin films for microwave and electronic applications

Large area YBa2Cu3O7 and Tl2Ba2CaCu2O8 thin films for microwave and electronic applications

Paper reviews recent work to develop high performance Tl2Ba2CaCu2O8 and YBa2Cu3O7 thin films for microwave and electronic device applications. The YBa2Cu3O7 thin films are produced by off-axis magnetron sputtering onto radiatively heated substrates and have surface roughness levels of < 1 nm over...

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Veröffentlicht in:Physica. C, Superconductivity Superconductivity, 2001-08, Vol.357-360, p.1488-1494
Hauptverfasser: Face, D.W., Small, R.J., Warrington, M.S., Pellicone, F.M., Martin, P.J.
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container_start_page 1488
container_title Physica. C, Superconductivity
container_volume 357-360
creator Face, D.W.
Small, R.J.
Warrington, M.S.
Pellicone, F.M.
Martin, P.J.
description Paper reviews recent work to develop high performance Tl2Ba2CaCu2O8 and YBa2Cu3O7 thin films for microwave and electronic device applications. The YBa2Cu3O7 thin films are produced by off-axis magnetron sputtering onto radiatively heated substrates and have surface roughness levels of < 1 nm over 2 in. diameter wafers, as determined by AFM. Double-sided Tl2Ba2CaCu2O8 films are produced on 3 in. diameter CeO2 buffered sapphire substrates with excellent uniformity of structural and electrical properties. These films have low microwave surface resistance up to high microwave power levels. Authors also report on the establishment of a six Sigma manufacturing capability for Tl2Ba2CaCu2O8 films. These films are used to fabricate a compact high performance eight-pole bandpass filter operating at 1.85 GHz and 80 K. 5 refs.
doi_str_mv 10.1016/S0921-4534(01)00566-4
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title Large area YBa2Cu3O7 and Tl2Ba2CaCu2O8 thin films for microwave and electronic applications
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