Scanning electron microscope studies of AlGaN films grown by organometallic vapor phase epitaxy

Microcathodoluminescence (MCL) and electron beam induced current (EBIC) studies were carried out on AlGaN films grown by organometallic vapor phase epitaxy (OMVPE) on sapphire and SiC. It is shown that both non-uniformities of distribution of deep recombination centers and of electron concentration...

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Veröffentlicht in:	Solid-state electronics 1998-04, Vol.42 (4), p.637-646
Hauptverfasser:	Polyakov, A.Y, Govorkov, A.V, Smirnov, N.B, Mil'vidskii, M.G, Redwing, J.M, Shin, M, Skowronski, M, Greve, D.W
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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