A flash-based SOC technology using a split-gate cell

The key aspects of system on chip (SOC) technology were examined by three generation of flash based SOC technology. All three generations were built upon the foundation of high performance logic process baselines. The essential components and success factors for a successful SOC technolgy in each technology component were discussed. For all generations of SOC technology, a split-gate flash cell was used. The technical support comprised of integrated circuit fabrication activities, ranging from the up-front customized product design support, process tailoring for each individual product to acheive low-cost and efficient wafer fabrication.