Application of aluminum films as temperature sensors for the compensation of output thermal shift of silicon piezoresistive pressure sensors

Aluminum thin film resistors are proposed for use as temperature sensors for the compensation of the thermal sensitivity and offset shift of pressure sensor output. An experimental investigation of Al films with different thicknesses and heat treatment was carried out in order to optimize the electr...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 1998-12, Vol.71 (3), p.161-166
Hauptverfasser:	STANKEVIC, V, SIMKEVICIUS, C
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum films Condensed matter: electronic structure, electrical, magnetic, and optical properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport phenomena in thin films and low-dimensional structures Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Low-field transport and mobility piezoresistance Physics Piezoresistive pressure sensors Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Temperature compensation Temperature sensors
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