Fabrication and magnetic properties of CoPt perpendicular patterned media

CoPt dot-arrays with dot diameters ranging 80–1000 nm have been fabricated by using electron beam lithography and reactive ion etching. The fabricated dots had their magnetic easy axes perpendicular to the plane. Dots with 80-nm-diameter were observed as single domain by magnetic force microscopy. T...

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Veröffentlicht in:	Journal of magnetism and magnetic materials 2001-10, Vol.235 (1), p.174-178
Hauptverfasser:	Aoyama, T., Okawa, S., Hattori, K., Hatate, H., Wada, Y., Uchiyama, K., Kagotani, T., Nishio, H., Sato, I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Condensed matter: electronic structure, electrical, magnetic, and optical properties Electron beam lithography Electronics Exact sciences and technology Magnetic and optical mass memories Magnetic force microscopy Magnetic properties and materials Magnetic recording materials Patterned media Physics Reactive ion etching Storage and reproduction of information Studies of specific magnetic materials Thermal stability
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Zusammenfassung:	CoPt dot-arrays with dot diameters ranging 80–1000 nm have been fabricated by using electron beam lithography and reactive ion etching. The fabricated dots had their magnetic easy axes perpendicular to the plane. Dots with 80-nm-diameter were observed as single domain by magnetic force microscopy. The CoPt dot-array with 80-nm-diameter showed much higher thermal stability than continuous films.
ISSN:	0304-8853
DOI:	10.1016/S0304-8853(01)00332-8