Polymeric optical waveguides for optical interconnections

Free-Standing polymeric optical waveguide films with 45 degree mirrors and MT connectors (mechanically transferable spacing connectors) were fabricated by spin-coating, photolithography and reactive ion etching. The spin-coated films had sufficient thickness controllability and surface smoothness fo...

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Veröffentlicht in:Thin solid films 1998-10, Vol.331 (1-2), p.303-308
Hauptverfasser: HIKITA, M, YOSHIMURA, R, USUI, M, TOMARU, S, IMAMURA, S
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container_end_page 308
container_issue 1-2
container_start_page 303
container_title Thin solid films
container_volume 331
creator HIKITA, M
YOSHIMURA, R
USUI, M
TOMARU, S
IMAMURA, S
description Free-Standing polymeric optical waveguide films with 45 degree mirrors and MT connectors (mechanically transferable spacing connectors) were fabricated by spin-coating, photolithography and reactive ion etching. The spin-coated films had sufficient thickness controllability and surface smoothness for them to be used to fabricate multimode waveguides with a low loss of less than 0.02 dB /cm at 0.83 mu m using deuterated-polymethylmethacrylate for the core and UV-cured resin for the cladding. For application to optical interconnections, a 45 degree mirror was formed in the waveguide by using a 90 degree V-shaped diamond blade, and the mirror loss was 0.3-0.7 dB depending on the measurement conditions. Free-standing polymeric waveguide films were mounted in an MT-compatible connector made of Pyrex glass by using UV curable resin. The insertion loss was about 1 dB which was sufficiently low for practical use.
doi_str_mv 10.1016/S0040-6090(98)00935-3
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subjects Applied sciences
Circuit properties
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Integrated optics. Optical fibers and wave guides
Optical and optoelectronic circuits
title Polymeric optical waveguides for optical interconnections
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