Magnetic properties of NdFeB thin films grown by a pulsed laser deposition
High energy product Nd 2Fe 14B films were grown on Si(1 0 0) substrate by KrF pulsed laser ablation using the targets of Nd x Fe 90.98− x B 9.02 ( x=17.51–27.51). The films of Nd 2Fe 14B single phase did not exhibit a preferred orientation. However, [2 2 1], [0 0 6] and [2 2 2] axes were prominent f...
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Veröffentlicht in: | Journal of magnetism and magnetic materials 1998-09, Vol.188 (1), p.100-108 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | High energy product Nd
2Fe
14B films were grown on Si(1
0
0) substrate by KrF pulsed laser ablation using the targets of Nd
x
Fe
90.98−
x
B
9.02 (
x=17.51–27.51). The films of Nd
2Fe
14B single phase did not exhibit a preferred orientation. However, [2
2
1], [0
0
6] and [2
2
2] axes were prominent for the films grown at the substrate temperature above 680°C by using the target of Nd
27.51Fe
63.47B
9.02. This condition provided the superior magnetic properties along the out-of-plane direction of films resulting in the magnetic properties of 4π
M
s=7
kG, 4π
M
r=4
kG, and
H
c=1000
Oe. The deposition rate was not much influenced by changing the substrate temperature (
T
s), but it increased linearly by increasing the beam energy density. The beam density of 3
J/cm
2 gave the optimal condition to have the highest 4π
M
r and
H
c simultaneously. The higher content of Nd induced a higher coercivity and 4π
M
r at the same time due to the finer grain size without prominent change in 4π
M
s. The films of
x=27.51 showed a grain size of less than 12
nm while that of
x=17.51 showed a grain size of about 15
nm. |
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ISSN: | 0304-8853 |
DOI: | 10.1016/S0304-8853(98)00173-5 |