Microstructures and thermomechanical properties of sputter-deposited NiTi(Fe) shape memory alloy films

The influence of iron on the nature of sputter-deposited NiTi(Fe) shape memory alloy films for possible microelectromechanical system applications was studied as a function of annealing conditions. The iron additions only result in the formation of dense intervals of stacking faults along the [101̄0...

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Veröffentlicht in:Materials letters 1998-03, Vol.34 (3), p.312-317
Hauptverfasser: Gong, F.F, Wen, X.L, Shen, H.M, Wang, Y.N, Jiang, E.Y
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container_issue 3
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container_title Materials letters
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creator Gong, F.F
Wen, X.L
Shen, H.M
Wang, Y.N
Jiang, E.Y
description The influence of iron on the nature of sputter-deposited NiTi(Fe) shape memory alloy films for possible microelectromechanical system applications was studied as a function of annealing conditions. The iron additions only result in the formation of dense intervals of stacking faults along the [101̄0] direction in the basal (0001) plane from 1 to 25 nm on average when specimens of N 51.60Ti 48.40 (at%) and Ni 51.87Ti 41.81Fe 6.32 (at%) are annealed at 850°C for 2.5 h. The crystallites of B2 austenite and Ni 4Ti 3 with a rhombohedral structure are present and their orientation relationship is determined when initially amorphous specimens of iron-free and iron-containing material are annealed at 550°C for 0.5 h. The iron additions reduce the cracking behavior and increase both the crystallization temperature and the density of planar defects.
doi_str_mv 10.1016/S0167-577X(97)00193-6
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The iron additions only result in the formation of dense intervals of stacking faults along the [101̄0] direction in the basal (0001) plane from 1 to 25 nm on average when specimens of N 51.60Ti 48.40 (at%) and Ni 51.87Ti 41.81Fe 6.32 (at%) are annealed at 850°C for 2.5 h. The crystallites of B2 austenite and Ni 4Ti 3 with a rhombohedral structure are present and their orientation relationship is determined when initially amorphous specimens of iron-free and iron-containing material are annealed at 550°C for 0.5 h. The iron additions reduce the cracking behavior and increase both the crystallization temperature and the density of planar defects.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/S0167-577X(97)00193-6</doi><tpages>6</tpages></addata></record>
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subjects Applied sciences
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Metals. Metallurgy
Microstructure
NiTi(Fe) shape memory alloy films
Physical properties of thin films, nonelectronic
Physics
Sputter-deposition
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thermomechanical properties
Thin film structure and morphology
title Microstructures and thermomechanical properties of sputter-deposited NiTi(Fe) shape memory alloy films
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