Channel waveguides fabricated in 2D photonic crystals of Si nanopillars

Two-dimensional photonic crystal (PC) slabs were fabricated by arranging Si nanopillars into square lattices with period of 490 nm. The fabrication process of nanopillars used iron clusters as nuclei for self-formation of etching masks to obtain high-aspect-ratio structures. The PC slabs were embedd...

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Veröffentlicht in:	Microelectronic engineering 2002-08, Vol.63 (1), p.259-265
Hauptverfasser:	Tada, Tetsuya, Poborchii, Vladimir V, Kanayama, Toshihiko
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Fundamental areas of phenomenology (including applications) Integrated optics. Optical fibers and wave guides Metal cluster Nanofabrication Optical and optoelectronic circuits Optical materials Optics Photonic bandgap materials Photonic crystal Physics Si pillar Transmission spectrum Waveguide
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