Channel waveguides fabricated in 2D photonic crystals of Si nanopillars
Two-dimensional photonic crystal (PC) slabs were fabricated by arranging Si nanopillars into square lattices with period of 490 nm. The fabrication process of nanopillars used iron clusters as nuclei for self-formation of etching masks to obtain high-aspect-ratio structures. The PC slabs were embedd...
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| Veröffentlicht in: | Microelectronic engineering 2002-08, Vol.63 (1), p.259-265 |
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| creator | Tada, Tetsuya Poborchii, Vladimir V Kanayama, Toshihiko |
| description | Two-dimensional photonic crystal (PC) slabs were fabricated by arranging Si nanopillars into square lattices with period of 490 nm. The fabrication process of nanopillars used iron clusters as nuclei for self-formation of etching masks to obtain high-aspect-ratio structures. The PC slabs were embedded in grooves (1.2 μm deep×200 μm wide×4 mm long), sandwiched between the two silver layers whose refractive index is less than 1 for light confinement. Two kinds of line defects, a missing row of pillars and a reduced-diameter-pillar row, were introduced into the PC. The photonic band gap (PBG) was clearly observed in transmittance spectra for wavelength
λ of 900–1000 nm. In the PBG, a sharp peak corresponding to the defect mode was observed at
λ=935 nm, which indicates the line defect acted as an optical waveguide. |
| doi_str_mv | 10.1016/S0167-9317(02)00623-8 |
| format | Article |
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λ of 900–1000 nm. In the PBG, a sharp peak corresponding to the defect mode was observed at
λ=935 nm, which indicates the line defect acted as an optical waveguide.</description><subject>Applied sciences</subject><subject>Circuit properties</subject><subject>Electric, optical and optoelectronic circuits</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>Integrated optics. Optical fibers and wave guides</subject><subject>Metal cluster</subject><subject>Nanofabrication</subject><subject>Optical and optoelectronic circuits</subject><subject>Optical materials</subject><subject>Optics</subject><subject>Photonic bandgap materials</subject><subject>Photonic crystal</subject><subject>Physics</subject><subject>Si pillar</subject><subject>Transmission spectrum</subject><subject>Waveguide</subject><issn>0167-9317</issn><issn>1873-5568</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2002</creationdate><recordtype>article</recordtype><recordid>eNqFkEtLAzEQx4MoWB8fQchF0cNqNtnNZk8iVasgeFDPYTpJbGTN1mRb8dubtqJHL_NgfvP6E3JUsvOSlfLiKZumaEXZnDJ-xpjkolBbZFSqRhR1LdU2Gf0iu2QvpTeW84qpEZmMZxCC7egnLO3rwhubqINp9AiDNdQHyq_pfNYPffBIMX6lAbpEe0efPA0Q-rnvOojpgOy4XLCHP36fvNzePI_viofHyf346qFAIdVQtNxVjbIlgFGO41S4ytXopoBlVdkctgpNDcZIQMVR1k2tmGgEbxsDskWxT042c-ex_1jYNOh3n9DmG4LtF0lzKVmtKp7BegNi7FOK1ul59O8Qv3TJ9Eo2vZZNrzTRjOu1bFrlvuOfBZAQOhchoE9_zaJRjLVV5i43nM3fLr2NOqG3Aa3x0eKgTe__2fQNmruCCA</recordid><startdate>20020801</startdate><enddate>20020801</enddate><creator>Tada, Tetsuya</creator><creator>Poborchii, Vladimir V</creator><creator>Kanayama, Toshihiko</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20020801</creationdate><title>Channel waveguides fabricated in 2D photonic crystals of Si nanopillars</title><author>Tada, Tetsuya ; Poborchii, Vladimir V ; Kanayama, Toshihiko</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c368t-92f478e1aad8f2cb3f4f5cfbac144ef5c98cd5add6ac82c657580373297da69c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Applied sciences</topic><topic>Circuit properties</topic><topic>Electric, optical and optoelectronic circuits</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>Integrated optics. Optical fibers and wave guides</topic><topic>Metal cluster</topic><topic>Nanofabrication</topic><topic>Optical and optoelectronic circuits</topic><topic>Optical materials</topic><topic>Optics</topic><topic>Photonic bandgap materials</topic><topic>Photonic crystal</topic><topic>Physics</topic><topic>Si pillar</topic><topic>Transmission spectrum</topic><topic>Waveguide</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Tada, Tetsuya</creatorcontrib><creatorcontrib>Poborchii, Vladimir V</creatorcontrib><creatorcontrib>Kanayama, Toshihiko</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Microelectronic engineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Tada, Tetsuya</au><au>Poborchii, Vladimir V</au><au>Kanayama, Toshihiko</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Channel waveguides fabricated in 2D photonic crystals of Si nanopillars</atitle><jtitle>Microelectronic engineering</jtitle><date>2002-08-01</date><risdate>2002</risdate><volume>63</volume><issue>1</issue><spage>259</spage><epage>265</epage><pages>259-265</pages><issn>0167-9317</issn><eissn>1873-5568</eissn><coden>MIENEF</coden><abstract>Two-dimensional photonic crystal (PC) slabs were fabricated by arranging Si nanopillars into square lattices with period of 490 nm. The fabrication process of nanopillars used iron clusters as nuclei for self-formation of etching masks to obtain high-aspect-ratio structures. The PC slabs were embedded in grooves (1.2 μm deep×200 μm wide×4 mm long), sandwiched between the two silver layers whose refractive index is less than 1 for light confinement. Two kinds of line defects, a missing row of pillars and a reduced-diameter-pillar row, were introduced into the PC. The photonic band gap (PBG) was clearly observed in transmittance spectra for wavelength
λ of 900–1000 nm. In the PBG, a sharp peak corresponding to the defect mode was observed at
λ=935 nm, which indicates the line defect acted as an optical waveguide.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/S0167-9317(02)00623-8</doi><tpages>7</tpages></addata></record> |
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| source | Elsevier ScienceDirect Journals Complete |
| subjects | Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Fundamental areas of phenomenology (including applications) Integrated optics. Optical fibers and wave guides Metal cluster Nanofabrication Optical and optoelectronic circuits Optical materials Optics Photonic bandgap materials Photonic crystal Physics Si pillar Transmission spectrum Waveguide |
| title | Channel waveguides fabricated in 2D photonic crystals of Si nanopillars |
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