Long and Short Range Order in Ion Irradiated Ceramics Studied by IBA, EXAFS and Raman

We summarize the results of a recent study on the damage accumulation and the resulting microstructure in heavy ion irradiated single crystalline Si, SiC, and SiO2 and in polycrystalline Si3N4. By combining the ion beam analysis techniques of Rutherford backscattering spectroscopy in channeling geometry and resonant nuclear reactions analysis with X-ray absorption, Raman-scattering and mechanical surface profiling, new insights into the development of both long- and short-range order during ion bombardment of these covalent materials were achieved. (Author)