Small silicon based pressure transducers for measurements in turbulent boundary layers

Small silicon-based sensors for the measurement of wall pressure in turbulent flows have been designed and fabricated using microelectronic technology. The sensor diaphragms have a side length of 100 and 300 microns, and polysilicon piezoresistive gauges were used for detection of the deflection. A...

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Veröffentlicht in:	Experiments in fluids 1994-06, Vol.17 (1-2), p.24-31
Hauptverfasser:	LÖFDAHL, L, KÄLVESTEN, E, STEMME, G
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Fluid dynamics Fundamental areas of phenomenology (including applications) Instrumentation for fluid dynamics Physics
Online-Zugang:	Volltext
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