Macroparticle-free TiN films prepared by arc ion-plating process

TiN thin films prepared by the arc ion-plating process usually have a significant quantity of macroparticles on their surface. In this experiment a rotating target was used to apply the centrifugal effect to prevent the formation of macroparticles on the surface of TiN thin films. The number of macr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Surface & coatings technology 1994-12, Vol.68, p.141-145
Hauptverfasser:	Kang, G.H., Uchida, H., Koh, E.S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Exact sciences and technology Ion and electron beam-assisted deposition ion plating Materials science Methods of deposition of films and coatings film growth and epitaxy Physics
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!