Alignment of crystallites in obliquely deposited cobalt films

The geometric alignment of crystallites was investigated using ellipsometry for evaporated cobalt films. The incidence angle was 45° and the gas pressure ranged from 0.008 to 2 Pa during argon gas inflow. The anisotropy of the reflection coefficient showed that above 0.6 Pa, crystallites preferentia...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1994-06, Vol.33 (6A), p.3448-3452
Hauptverfasser:	HARA, K, ITOH, K, KAMIYA, M, FUJIWARA, H, OKAMOTO, K, HASHIMOTO, T
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Metals. Metallurgy Physics Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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