Hot-filament-assisted chemical vapor deposition of carbon: film growth and filament reactions
Pure glassy C films as thick as 25 000 Angstroms were grown on nearby Si substrates via reactions between a hot W filament and cyclopentane. The reactions and their temp. dependence were described. 36 refs.
Gespeichert in:
| Veröffentlicht in: | Journal of applied physics 1994-01, Vol.76 (2), p.1220-1227 |
|---|---|
| 1. Verfasser: | |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!