High speed time-of-flight displacement measurement based on dual-comb electronically controlled optical sampling
We demonstrate a direct time-of-flight approach that utilizes dual-comb electronically controlled optical sampling (ECOPS) to measure small displacements. ECOPS is enabled by electrically controlling the repetition rate of one laser via an intracavity electric-optical modulator (EOM). The acquisitio...
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Veröffentlicht in: | Optics express 2022-02, Vol.30 (5), p.8391-8398 |
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creator | Shi, Yiyi Hu, Dingtong Xue, Rui Wu, Ziling Dong, Jiaqi Tian, Haochen Wang, Chunze Wang, Jiaqi Hu, Minglie Song, Youjian |
description | We demonstrate a direct time-of-flight approach that utilizes dual-comb electronically controlled optical sampling (ECOPS) to measure small displacements. ECOPS is enabled by electrically controlling the repetition rate of one laser via an intracavity electric-optical modulator (EOM). The acquisition rate is set by the EOM modulation frequency, which is much higher than commonly used asynchronous optical sampling (ASOPS). In a proof-of-principle experiment, an 80-kHz acquisition rate is obtained with a pair of ∼105 MHz repetition rate Er-fiber lasers. At an average time of 30 ms, a measurement precision evaluated with Allan deviation reaches 26.1 nm for a 40-µm static displacement. In a dynamic measurement, a 500-Hz sinusoidal vibration with 15 µm amplitude has also been identified. The high-precision and high-speed displacement measurement technique can be potentially used in 3D surface profilometry of microelectronic step-structures and real-time monitoring of high frequency mechanical vibrations, etc. |
doi_str_mv | 10.1364/OE.454981 |
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ECOPS is enabled by electrically controlling the repetition rate of one laser via an intracavity electric-optical modulator (EOM). The acquisition rate is set by the EOM modulation frequency, which is much higher than commonly used asynchronous optical sampling (ASOPS). In a proof-of-principle experiment, an 80-kHz acquisition rate is obtained with a pair of ∼105 MHz repetition rate Er-fiber lasers. At an average time of 30 ms, a measurement precision evaluated with Allan deviation reaches 26.1 nm for a 40-µm static displacement. In a dynamic measurement, a 500-Hz sinusoidal vibration with 15 µm amplitude has also been identified. 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ECOPS is enabled by electrically controlling the repetition rate of one laser via an intracavity electric-optical modulator (EOM). The acquisition rate is set by the EOM modulation frequency, which is much higher than commonly used asynchronous optical sampling (ASOPS). In a proof-of-principle experiment, an 80-kHz acquisition rate is obtained with a pair of ∼105 MHz repetition rate Er-fiber lasers. At an average time of 30 ms, a measurement precision evaluated with Allan deviation reaches 26.1 nm for a 40-µm static displacement. In a dynamic measurement, a 500-Hz sinusoidal vibration with 15 µm amplitude has also been identified. 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title | High speed time-of-flight displacement measurement based on dual-comb electronically controlled optical sampling |
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