Advanced surface treatments by plasma ion implantation

Plasma ion implantation techniques have emerged recently as non-line-of-sight alternatives to ion beams for surface modifications in the energy range 10–100 keV. Experimental work performed over the last 7 years is reviewed, pointing out the progress that has been made in both the physical understan...

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Veröffentlicht in:	Surface & coatings technology 1994-12, Vol.68, p.285-293
Hauptverfasser:	Collins, G.A., Hutchings, R., Tendys, J., Samandi, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Exact sciences and technology Ion and electron beam-assisted deposition ion plating Materials science Methods of deposition of films and coatings film growth and epitaxy Physics
Online-Zugang:	Volltext
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