Interfaces in SiC/C CVD Multilayers
SiC/C multilayers were chemically vapor deposited under reduced pressure with flow rate modulation of two different gaseous vectors. Mechanical properties have been studied by three-point bending tests, and microstructure and phase localization have been analyzed by TEM and HREM. (Author)
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| Veröffentlicht in: | Materials science forum 1996-01, Vol.207-209, p.237-240 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | SiC/C multilayers were chemically vapor deposited under reduced pressure with flow rate modulation of two different gaseous vectors. Mechanical properties have been studied by three-point bending tests, and microstructure and phase localization have been analyzed by TEM and HREM. (Author) |
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| ISSN: | 0255-5476 1662-9752 1662-9752 |
| DOI: | 10.4028/www.scientific.net/MSF.207-209.237 |