Superconductor wiring in multichip module for Josephson LSI circuits

Nb/polyimide stacked layers on a multilayer ceramic substrate makes it possible to fabricate superconducting off-chip wiring for control signal lines. This superconducting multichip module (SuperMCM) also provides matching circuits for the clock signal and DC bias circuits beneath the superconductin...

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Veröffentlicht in:Japanese Journal of Applied Physics 1993-07, Vol.32 (7A), p.L898-L900
Hauptverfasser: TANAHASHI, S, KUBO, T, KAWABATA, K, JIKUHARA, R, KAJI, G, TERASAWA, M, NAKAGAWA, H, AOYAGI, M, KUROSAWA, I, TAKADA, S
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container_end_page L900
container_issue 7A
container_start_page L898
container_title Japanese Journal of Applied Physics
container_volume 32
creator TANAHASHI, S
KUBO, T
KAWABATA, K
JIKUHARA, R
KAJI, G
TERASAWA, M
NAKAGAWA, H
AOYAGI, M
KUROSAWA, I
TAKADA, S
description Nb/polyimide stacked layers on a multilayer ceramic substrate makes it possible to fabricate superconducting off-chip wiring for control signal lines. This superconducting multichip module (SuperMCM) also provides matching circuits for the clock signal and DC bias circuits beneath the superconducting transmission lines. The first prototype SuperMCM in the world successfully made,which has been designed to drive Josephson LSI chips at the highest clock frequency of 1.2 GHz.
doi_str_mv 10.1143/jjap.32.l898
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
title Superconductor wiring in multichip module for Josephson LSI circuits
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