AES and SIMS study of magneto-optical information storage layer structure

Magneto-optical (MO) data storage combines the major advantages of magnetic (erasability, re-usability) and optical (non-contact writing and reading) recording technologies, offering storage densities of up to 5 × 10 8 bit/cm 2 and capacities in the GByte/disk range. The paper reports on the surface and interface characterization of three-layered (SiN x /TbFeCo/SiN x ) MO disc structures. SiN x layers are applied in high-density MO information devices to prevent oxidation of the magnetic layer and to provide optical matching. The mechanical and optical properties of SiN x protective layers are largely influenced by the chemical state and composition. In the present work AES characterization of these layers was performed comparing the inhomogeneity, as well as the O and C contamination of the samples. The TbFeCo layer is generally deposited as an amorphous thin film. The quality and the composition of this layer are determined by the conditions of the planar magnetron sputtering process. The results of the SIMS investigation reflected the effect of the parameter settings of the deposition.