Low-fluence excimer laser irradiation-induced defect formation in indium-tin oxide films

DC sputtered indium-tin oxide (ITO) films of 500 nm thickness are irradiated with single pulses of fluences between 190 and 510 mJ/cm2 from a KrF excimer laser. The irradiation induced changes in optical spectra are consistently described through the behaviour of four (Gaussian-like) absorption band...

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Veröffentlicht in:	Applied surface science 1996-04, Vol.96-98 (1-4), p.363-369
Hauptverfasser:	Szo¨re´nyi, T., Laude, L.D., Berto´ti, I., Geretovszky, Zs, Ka´ntor, Z.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Electron states Exact sciences and technology Impurity and defect levels Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Other nonmetals Other semiconductors Physical radiation effects, radiation damage Physics Structure of solids and liquids crystallography Ultraviolet, visible, and infrared radiation effects (including laser radiation)
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