Effect of Additional Elements on the Crystallization Process in Fe-Ta-C Thin Films
The crystallization mechanisms of Fe-Ta-C alloy films added Nb and Cr were studied in terms of changes in the crystal structure and magnetic properties. The Fe-Ta-C thin films as prepared by sputtering have an amorphous like X-ray diffraction profile. However, microcrystals of TaC of about 5 nm size...
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| Veröffentlicht in: | Journal of the Japan Institute of Metals and Materials 1996, Vol.60(5), pp.519-528 |
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| creator | Kirino, Fumiyoshi Otomo, Shigekazu Koiso, Nagatsugu Yano, Fumiko |
| description | The crystallization mechanisms of Fe-Ta-C alloy films added Nb and Cr were studied in terms of changes in the crystal structure and magnetic properties. The Fe-Ta-C thin films as prepared by sputtering have an amorphous like X-ray diffraction profile. However, microcrystals of TaC of about 5 nm size were observed by TEM. Through DSC measurement, the crystallization temperature of the Fe alloy film was determined to be 753 K. However, the diffraction peak of α-Fe started to appear at 713 K, and the complete crystallization of the film occurred at 753 K. The sturation induction Bs of a Fe-Ta-C thin film before annealing was 0.76 T. The α-Fe grain size of the Fe-Ta-C thin film after annealing was 5 to 12 nm. The coercive force was 720 A/m befor annealing at 823 K for 1800 s. After annealing this film at 823 K for 3600 s, the coercive force was 32 A/m, but in the magnetic film, a component with higher coercive force was formed. To control the Fe grain size, Cr which dissolves into α-Fe was added. To control the grain size of TaC, Nb which reacts to the carbon was added. When Nb and Cr were added to Fe-Ta-C, no microcrystal such as TaC was observed under TEM in the as deposited film, indicating that the film is in an amorphous state. The DSC measurements of the Cr- and Nb-doped films showed that the crystallization temperature is 787 K, higher than that in Fe-Ta-C films. The complete crystallization of Cr- and Nb-doped Fe-Ta-C alloy thin films occurred at the same temperature. The magnetic properties also changed at 787 K. The Bs value of the as-deposited Fe-Ta-Cr-Nb-C film was 0.1 T. This is smaller than that of the Fe-Ta-C thin film. This is consistent with the TEM observation of the as-deposited film. The coercivity Hc was 16 A/m, which is smaller than 32 A/m of the Fe-Ta-C thin film. High coercive force component as was seen in the Fe-Ta-C was not formed in the Fe-Ta-Nb-Cr-C film. Controlling the crystallization by adding elements such as Cr and Nb, we significantly improved the soft magnetic properties of Fe-Ta-C films. |
| doi_str_mv | 10.2320/jinstmet1952.60.5_519 |
| format | Article |
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The Fe-Ta-C thin films as prepared by sputtering have an amorphous like X-ray diffraction profile. However, microcrystals of TaC of about 5 nm size were observed by TEM. Through DSC measurement, the crystallization temperature of the Fe alloy film was determined to be 753 K. However, the diffraction peak of α-Fe started to appear at 713 K, and the complete crystallization of the film occurred at 753 K. The sturation induction Bs of a Fe-Ta-C thin film before annealing was 0.76 T. The α-Fe grain size of the Fe-Ta-C thin film after annealing was 5 to 12 nm. The coercive force was 720 A/m befor annealing at 823 K for 1800 s. After annealing this film at 823 K for 3600 s, the coercive force was 32 A/m, but in the magnetic film, a component with higher coercive force was formed. To control the Fe grain size, Cr which dissolves into α-Fe was added. To control the grain size of TaC, Nb which reacts to the carbon was added. When Nb and Cr were added to Fe-Ta-C, no microcrystal such as TaC was observed under TEM in the as deposited film, indicating that the film is in an amorphous state. The DSC measurements of the Cr- and Nb-doped films showed that the crystallization temperature is 787 K, higher than that in Fe-Ta-C films. The complete crystallization of Cr- and Nb-doped Fe-Ta-C alloy thin films occurred at the same temperature. The magnetic properties also changed at 787 K. The Bs value of the as-deposited Fe-Ta-Cr-Nb-C film was 0.1 T. This is smaller than that of the Fe-Ta-C thin film. This is consistent with the TEM observation of the as-deposited film. The coercivity Hc was 16 A/m, which is smaller than 32 A/m of the Fe-Ta-C thin film. High coercive force component as was seen in the Fe-Ta-C was not formed in the Fe-Ta-Nb-Cr-C film. Controlling the crystallization by adding elements such as Cr and Nb, we significantly improved the soft magnetic properties of Fe-Ta-C films.</description><identifier>ISSN: 0021-4876</identifier><identifier>EISSN: 1880-6880</identifier><identifier>DOI: 10.2320/jinstmet1952.60.5_519</identifier><identifier>CODEN: NIKGAV</identifier><language>eng ; jpn</language><publisher>Sendai: The Japan Institute of Metals and Materials</publisher><subject>annealing ; crystallization mechanisms ; differential scanning calorimetry ; grain size ; iron-tantalum-carbon film ; soft magnetic properties</subject><ispartof>Journal of the Japan Institute of Metals and Materials, 1996, Vol.60(5), pp.519-528</ispartof><rights>The Japan Institute of Metals</rights><rights>1996 INIST-CNRS</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,1882,4023,27922,27923,27924</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=3156198$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Kirino, Fumiyoshi</creatorcontrib><creatorcontrib>Otomo, Shigekazu</creatorcontrib><creatorcontrib>Koiso, Nagatsugu</creatorcontrib><creatorcontrib>Yano, Fumiko</creatorcontrib><title>Effect of Additional Elements on the Crystallization Process in Fe-Ta-C Thin Films</title><title>Journal of the Japan Institute of Metals and Materials</title><addtitle>J. Japan Inst. Metals and Materials</addtitle><description>The crystallization mechanisms of Fe-Ta-C alloy films added Nb and Cr were studied in terms of changes in the crystal structure and magnetic properties. The Fe-Ta-C thin films as prepared by sputtering have an amorphous like X-ray diffraction profile. However, microcrystals of TaC of about 5 nm size were observed by TEM. Through DSC measurement, the crystallization temperature of the Fe alloy film was determined to be 753 K. However, the diffraction peak of α-Fe started to appear at 713 K, and the complete crystallization of the film occurred at 753 K. The sturation induction Bs of a Fe-Ta-C thin film before annealing was 0.76 T. The α-Fe grain size of the Fe-Ta-C thin film after annealing was 5 to 12 nm. The coercive force was 720 A/m befor annealing at 823 K for 1800 s. After annealing this film at 823 K for 3600 s, the coercive force was 32 A/m, but in the magnetic film, a component with higher coercive force was formed. To control the Fe grain size, Cr which dissolves into α-Fe was added. To control the grain size of TaC, Nb which reacts to the carbon was added. When Nb and Cr were added to Fe-Ta-C, no microcrystal such as TaC was observed under TEM in the as deposited film, indicating that the film is in an amorphous state. The DSC measurements of the Cr- and Nb-doped films showed that the crystallization temperature is 787 K, higher than that in Fe-Ta-C films. The complete crystallization of Cr- and Nb-doped Fe-Ta-C alloy thin films occurred at the same temperature. The magnetic properties also changed at 787 K. The Bs value of the as-deposited Fe-Ta-Cr-Nb-C film was 0.1 T. This is smaller than that of the Fe-Ta-C thin film. This is consistent with the TEM observation of the as-deposited film. The coercivity Hc was 16 A/m, which is smaller than 32 A/m of the Fe-Ta-C thin film. High coercive force component as was seen in the Fe-Ta-C was not formed in the Fe-Ta-Nb-Cr-C film. Controlling the crystallization by adding elements such as Cr and Nb, we significantly improved the soft magnetic properties of Fe-Ta-C films.</description><subject>annealing</subject><subject>crystallization mechanisms</subject><subject>differential scanning calorimetry</subject><subject>grain size</subject><subject>iron-tantalum-carbon film</subject><subject>soft magnetic properties</subject><issn>0021-4876</issn><issn>1880-6880</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1996</creationdate><recordtype>article</recordtype><recordid>eNptkEFLAzEQhYMoWLQ_QchBvG3N7G6ym6OUagVBkXoOaXZiU7K7mqSH-uvd2lo8eJlhmO-9B4-QK2CTvMjZ7dp1MbWYQPJ8ItiEKw7yhIygrlkmhnFKRozlkJV1Jc7JOEa3ZIxJAYLJEXmdWYsm0d7Su6ZxyfWd9nTmscUuRdp3NK2QTsM2Ju29-9I7gr6E3mCM1HX0HrOFzqZ0sdodzrfxkpxZ7SOOD_uCvN3PFtN59vT88Di9e8pMUUHKrBGwLCWgFKbEynBAvURWypKXRYMWm6qWoBE4s1g0zEAh6qUUeV4KtLwqLsjN3vcj9J8bjEm1Lhr0XnfYb6LKBQxWrB5AvgdN6GMMaNVHcK0OWwVM7UpUf0tUgqmfEgfd9SFAR6O9DbozLh7FBXABcmc_32ProaN3PP51SM54_Mf8N-GImJUOCrviG1JFjlE</recordid><startdate>1996</startdate><enddate>1996</enddate><creator>Kirino, Fumiyoshi</creator><creator>Otomo, Shigekazu</creator><creator>Koiso, Nagatsugu</creator><creator>Yano, Fumiko</creator><general>The Japan Institute of Metals and Materials</general><general>Nippon Kinzoku Gakkai</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>1996</creationdate><title>Effect of Additional Elements on the Crystallization Process in Fe-Ta-C Thin Films</title><author>Kirino, Fumiyoshi ; Otomo, Shigekazu ; Koiso, Nagatsugu ; Yano, Fumiko</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c371t-fc61b491e96c4e7c51eabe0494543defed7891ae150fe3d0c1368b962246ef573</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng ; jpn</language><creationdate>1996</creationdate><topic>annealing</topic><topic>crystallization mechanisms</topic><topic>differential scanning calorimetry</topic><topic>grain size</topic><topic>iron-tantalum-carbon film</topic><topic>soft magnetic properties</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kirino, Fumiyoshi</creatorcontrib><creatorcontrib>Otomo, Shigekazu</creatorcontrib><creatorcontrib>Koiso, Nagatsugu</creatorcontrib><creatorcontrib>Yano, Fumiko</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Journal of the Japan Institute of Metals and Materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kirino, Fumiyoshi</au><au>Otomo, Shigekazu</au><au>Koiso, Nagatsugu</au><au>Yano, Fumiko</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effect of Additional Elements on the Crystallization Process in Fe-Ta-C Thin Films</atitle><jtitle>Journal of the Japan Institute of Metals and Materials</jtitle><addtitle>J. Japan Inst. Metals and Materials</addtitle><date>1996</date><risdate>1996</risdate><volume>60</volume><issue>5</issue><spage>519</spage><epage>528</epage><pages>519-528</pages><issn>0021-4876</issn><eissn>1880-6880</eissn><coden>NIKGAV</coden><abstract>The crystallization mechanisms of Fe-Ta-C alloy films added Nb and Cr were studied in terms of changes in the crystal structure and magnetic properties. The Fe-Ta-C thin films as prepared by sputtering have an amorphous like X-ray diffraction profile. However, microcrystals of TaC of about 5 nm size were observed by TEM. Through DSC measurement, the crystallization temperature of the Fe alloy film was determined to be 753 K. However, the diffraction peak of α-Fe started to appear at 713 K, and the complete crystallization of the film occurred at 753 K. The sturation induction Bs of a Fe-Ta-C thin film before annealing was 0.76 T. The α-Fe grain size of the Fe-Ta-C thin film after annealing was 5 to 12 nm. The coercive force was 720 A/m befor annealing at 823 K for 1800 s. After annealing this film at 823 K for 3600 s, the coercive force was 32 A/m, but in the magnetic film, a component with higher coercive force was formed. To control the Fe grain size, Cr which dissolves into α-Fe was added. To control the grain size of TaC, Nb which reacts to the carbon was added. When Nb and Cr were added to Fe-Ta-C, no microcrystal such as TaC was observed under TEM in the as deposited film, indicating that the film is in an amorphous state. The DSC measurements of the Cr- and Nb-doped films showed that the crystallization temperature is 787 K, higher than that in Fe-Ta-C films. The complete crystallization of Cr- and Nb-doped Fe-Ta-C alloy thin films occurred at the same temperature. The magnetic properties also changed at 787 K. The Bs value of the as-deposited Fe-Ta-Cr-Nb-C film was 0.1 T. This is smaller than that of the Fe-Ta-C thin film. This is consistent with the TEM observation of the as-deposited film. The coercivity Hc was 16 A/m, which is smaller than 32 A/m of the Fe-Ta-C thin film. High coercive force component as was seen in the Fe-Ta-C was not formed in the Fe-Ta-Nb-Cr-C film. Controlling the crystallization by adding elements such as Cr and Nb, we significantly improved the soft magnetic properties of Fe-Ta-C films.</abstract><cop>Sendai</cop><pub>The Japan Institute of Metals and Materials</pub><doi>10.2320/jinstmet1952.60.5_519</doi><tpages>10</tpages><oa>free_for_read</oa></addata></record> |
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| subjects | annealing crystallization mechanisms differential scanning calorimetry grain size iron-tantalum-carbon film soft magnetic properties |
| title | Effect of Additional Elements on the Crystallization Process in Fe-Ta-C Thin Films |
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