Dielectric Dispersion of Polycrystalline Aluminum Nitride at Microwave Frequencies

Complex permittivity of polycrystalline AlN was measured over the frequency range 100 MHz to 13 GHz using reflection coefficient and cavity resonator methods. Dielectric relaxation peaks of loss tangent were observed in the frequency range 200 MHz to 3 GHz. The maximum value of loss tangent was ∼200...

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Veröffentlicht in:Journal of the American Ceramic Society 1996-06, Vol.79 (6), p.1453-1456
Hauptverfasser: Nakayama, Akira, Nambu, Shinji, Inagaki, Masahiro, Miyauchi, Masahiko, Itoh, Nobuyuki
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Sprache:eng
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