Crystallization and martensitic transformation of sputter-deposited Ti-Ni thin films

Ti-Ni alloy films were deposited on quartz substrates by sputtering in argon atmosphere, using a sputtering target of an equiatomic TiNi alloy. The composition of the films was determined by electron probe micro-analysis using a calibration line prepared from bulk samples of well-established composi...

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Veröffentlicht in:Nihon Kinzoku Gakkai shi (1952) 1996-10, Vol.60 (1), p.921-927
Hauptverfasser: Kwamura, Yoshio, Gyobu, Atsuo, Horikawa, Hiroshi, Saburu, Toshio
Format: Artikel
Sprache:jpn
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