Deposition of corrosion-resistant chromium and nitrogen-doped chromium coatings by cathodic magnetron sputtering

This work deals with the realization of corrosion-resistant chromium-based thin films by cathodic magnetron sputtering. A systematic study of the deposition parameters (substrate temperature, pressure and gas mixture composition) has been carried out to determine the optimal conditions to obtain fil...

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Veröffentlicht in:	Surface & coatings technology 1996-02, Vol.79 (1), p.25-34
Hauptverfasser:	Cosset, F., Contoux, G., Celerier, A., Machet, J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Chromium Corrosion resistant coatings Exact sciences and technology Magnetron sputtering Metallic coatings Metals. Metallurgy Physical vapour deposition Production techniques Surface treatment
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