Large volume tomography using plasma FIB-SEM: A comprehensive case study on black silicon

•This work demonstrates that specimen preparation, including the orientation of the volume of interest, is critical for the quality of the final reconstructed 3D model.•Three unique configurations incrementally optimized for higher total throughput are thoroughly explored.•The work demonstrates how...

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Veröffentlicht in:Ultramicroscopy 2022-03, Vol.233, p.113458-113458, Article 113458
Hauptverfasser: Zhang, Yu, Kong, Charlie, Scardera, Giuseppe, Abbott, Malcolm, Payne, David N.R., Hoex, Bram
Format: Artikel
Sprache:eng
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