Metastability of yttrium oxides

Metastable yttrium oxide films are synthesized using reactive sputter deposition. The yttrium concentration of the as-deposited film is found to vary as a function of the sputter deposition rate. In addition to the synthesis of the cubic equilibrium phase Y 2O 3, oxide compounds can be formed with 4...

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Veröffentlicht in:	Surface & coatings technology 1993-12, Vol.61 (1), p.14-19
Hauptverfasser:	Jankowski, A.F., Stratman, M.P., Sedillo, E.M., Hayes, J.P., Gallegos, G.F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Physical properties of thin films, nonelectronic Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thermal stability thermal effects
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