Metastability of yttrium oxides
Metastable yttrium oxide films are synthesized using reactive sputter deposition. The yttrium concentration of the as-deposited film is found to vary as a function of the sputter deposition rate. In addition to the synthesis of the cubic equilibrium phase Y 2O 3, oxide compounds can be formed with 4...
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| Veröffentlicht in: | Surface & coatings technology 1993-12, Vol.61 (1), p.14-19 |
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| container_title | Surface & coatings technology |
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| creator | Jankowski, A.F. Stratman, M.P. Sedillo, E.M. Hayes, J.P. Gallegos, G.F. |
| description | Metastable yttrium oxide films are synthesized using reactive sputter deposition. The yttrium concentration of the as-deposited film is found to vary as a function of the sputter deposition rate. In addition to the synthesis of the cubic equilibrium phase Y
2O
3, oxide compounds can be formed with 40–80 at. % Y. The crystalline state of the as-deposited film is dependent on the substrate temperature. A metastable, orthorhombic yttrium-rich oxide is formed on room temperature substrates. Substrates of Ta
10W are coated with several micrometers of yttrium oxide. The stability of these yttrium oxide coatings is investigated as they are subjected to an atmospheric pressure of oxygen at an elevated temperature of 1773 K. The coatings and substrates are examined for the stability of the crystalline structure, composition, cracking, adhesion and corrosion. An yttrium-rich oxide coating is found to offer the best corrosion protection to the Ta
10W substrate. |
| doi_str_mv | 10.1016/0257-8972(93)90195-T |
| format | Article |
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2O
3, oxide compounds can be formed with 40–80 at. % Y. The crystalline state of the as-deposited film is dependent on the substrate temperature. A metastable, orthorhombic yttrium-rich oxide is formed on room temperature substrates. Substrates of Ta
10W are coated with several micrometers of yttrium oxide. The stability of these yttrium oxide coatings is investigated as they are subjected to an atmospheric pressure of oxygen at an elevated temperature of 1773 K. The coatings and substrates are examined for the stability of the crystalline structure, composition, cracking, adhesion and corrosion. An yttrium-rich oxide coating is found to offer the best corrosion protection to the Ta
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2O
3, oxide compounds can be formed with 40–80 at. % Y. The crystalline state of the as-deposited film is dependent on the substrate temperature. A metastable, orthorhombic yttrium-rich oxide is formed on room temperature substrates. Substrates of Ta
10W are coated with several micrometers of yttrium oxide. The stability of these yttrium oxide coatings is investigated as they are subjected to an atmospheric pressure of oxygen at an elevated temperature of 1773 K. The coatings and substrates are examined for the stability of the crystalline structure, composition, cracking, adhesion and corrosion. An yttrium-rich oxide coating is found to offer the best corrosion protection to the Ta
10W substrate.</description><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Deposition by sputtering</subject><subject>Exact sciences and technology</subject><subject>Materials science</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Physical properties of thin films, nonelectronic</subject><subject>Physics</subject><subject>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><subject>Thermal stability; thermal effects</subject><issn>0257-8972</issn><issn>1879-3347</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1993</creationdate><recordtype>article</recordtype><recordid>eNp9kEtLAzEUhYMoWKv_QLALEV2M3jwmmWwEKb6g4qauQ5K5A5FppyYZsf_eqS1durqb75zLdwg5p3BLgco7YKUqKq3YteY3Gqgui_kBGdFK6YJzoQ7JaI8ck5OUPgGAKi1G5OINs03ZutCGvJ50zWSdcwz9YtL9hBrTKTlqbJvwbHfH5OPpcT59KWbvz6_Th1nhuRS5oCV1CsrGuQaqWtQOJNVMgqXoJVLwFVhWO1FLEFIxqQaESwaN456qEvmYXG17V7H76jFlswjJY9vaJXZ9MkxSEJVQAyi2oI9dShEbs4phYePaUDCbNcxG1WxUjebmbw0zH2KXu36bvG2baJc-pH1WADAtqwG732I4uH4HjCb5gEuPdYjos6m78P-fX8AjcdI</recordid><startdate>19931203</startdate><enddate>19931203</enddate><creator>Jankowski, A.F.</creator><creator>Stratman, M.P.</creator><creator>Sedillo, E.M.</creator><creator>Hayes, J.P.</creator><creator>Gallegos, G.F.</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>19931203</creationdate><title>Metastability of yttrium oxides</title><author>Jankowski, A.F. ; Stratman, M.P. ; Sedillo, E.M. ; Hayes, J.P. ; Gallegos, G.F.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c364t-151b705fbbf08d4db0619260a1ec6e10c80a2db4d604672674db3620fb3c175e3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1993</creationdate><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Deposition by sputtering</topic><topic>Exact sciences and technology</topic><topic>Materials science</topic><topic>Methods of deposition of films and coatings; film growth and epitaxy</topic><topic>Physical properties of thin films, nonelectronic</topic><topic>Physics</topic><topic>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</topic><topic>Thermal stability; thermal effects</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Jankowski, A.F.</creatorcontrib><creatorcontrib>Stratman, M.P.</creatorcontrib><creatorcontrib>Sedillo, E.M.</creatorcontrib><creatorcontrib>Hayes, J.P.</creatorcontrib><creatorcontrib>Gallegos, G.F.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Surface & coatings technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Jankowski, A.F.</au><au>Stratman, M.P.</au><au>Sedillo, E.M.</au><au>Hayes, J.P.</au><au>Gallegos, G.F.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Metastability of yttrium oxides</atitle><jtitle>Surface & coatings technology</jtitle><date>1993-12-03</date><risdate>1993</risdate><volume>61</volume><issue>1</issue><spage>14</spage><epage>19</epage><pages>14-19</pages><issn>0257-8972</issn><eissn>1879-3347</eissn><coden>SCTEEJ</coden><abstract>Metastable yttrium oxide films are synthesized using reactive sputter deposition. The yttrium concentration of the as-deposited film is found to vary as a function of the sputter deposition rate. In addition to the synthesis of the cubic equilibrium phase Y
2O
3, oxide compounds can be formed with 40–80 at. % Y. The crystalline state of the as-deposited film is dependent on the substrate temperature. A metastable, orthorhombic yttrium-rich oxide is formed on room temperature substrates. Substrates of Ta
10W are coated with several micrometers of yttrium oxide. The stability of these yttrium oxide coatings is investigated as they are subjected to an atmospheric pressure of oxygen at an elevated temperature of 1773 K. The coatings and substrates are examined for the stability of the crystalline structure, composition, cracking, adhesion and corrosion. An yttrium-rich oxide coating is found to offer the best corrosion protection to the Ta
10W substrate.</abstract><cop>Lausanne</cop><pub>Elsevier B.V</pub><doi>10.1016/0257-8972(93)90195-T</doi><tpages>6</tpages></addata></record> |
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| ispartof | Surface & coatings technology, 1993-12, Vol.61 (1), p.14-19 |
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| language | eng |
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| source | Elsevier ScienceDirect Journals |
| subjects | Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Physical properties of thin films, nonelectronic Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thermal stability thermal effects |
| title | Metastability of yttrium oxides |
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