Study on Pyrolytic Mechanisms of n‑Perfluorosilanes Si n F2n+2 (2 ≤ n < 6) and Perfluorocyclosilanes Si n F2n (3 ≤ n ≤ 6)

In this paper, the pyrolytic mechanisms of n-perfluorosilanes Si n F2n+2 (2 ≤ n < 6) and perfluorocyclosilanes Si n F2n (3 ≤ n ≤ 6) are studied in terms of kinetics and thermodynamics by theoretical calculation, and the pyrolytic reaction paths of Si n F2n+2 (2 ≤ n < 6) and Si n F2n (3 ≤ n ≤ 6...

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Veröffentlicht in:	ACS omega 2021-12, Vol.6 (48), p.32841-32851
Hauptverfasser:	Zhao, Yuhan, Tang, Anjiang, Huan, Qishan, Tang, Shiyun, Wei, Deju, Guo, Junjiang, Chen, LiJun
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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