Growth of native oxide and accumulation of organic matter on bare Si wafer in air

This letter reports the effect of organic matter on the growth of native oxide on a Si surface. Bare Si wafers and Si wafers with native oxide were stored under various conditions in a clean room and the thickness of native oxide was examined. In the case of the bare Si wafers, the native oxide hard...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Japanese Journal of Applied Physics 1993-08, Vol.32 (8A), p.L1031-L1033
Hauptverfasser:	OKADA, C, KOBAYASHI, H, TAKAHASHI, I, RYUTA, J, SHINGYOUJI, T
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Defects and impurities in crystals microstructure Exact sciences and technology Impurities: concentration, distribution, and gradients Physics Structure of solids and liquids crystallography
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!