Evidence for reversible dissociative adsorption in the reaction of molecular chlorine with gallium arsenide
The reaction of molecular chlorine with the (100) face of a gallium arsenide crystal has been studied at pressures of Cl 2 between 0.10 and 9.0 Torr and in the temperature range from 90 to 110 °C. In contrast to an earlier report, the etch rate was found to be half order with respect to Cl 2 . The s...
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| Veröffentlicht in: | Canadian journal of chemistry 1995-05, Vol.73 (5), p.735-739 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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