An integrated optical waveguide micro‐cantilever system for chip‐based AFM

An optical waveguide cantilever system with a tip is introduced as the displacement detection system of chip‐based atomic force microscopy (AFM) system. A chip‐based AFM on optical waveguide is demonstrated with sensitivity of up to 4.0 × 10–2 nm–1, which is mainly constructed by a 210 nm thick opti...

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Veröffentlicht in:	Journal of microscopy (Oxford) 2022-02, Vol.285 (2), p.112-116
Hauptverfasser:	Tang, Xinxin, Fan, Guofang, Zhang, Hongru, Dai, Xingang, Hu, Yanjun, Zhang, Zhiping, Li, Yuan
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopy atomic force microscopy (AFM) chip‐based integrated optical waveguide cantilever system Microscopes nano‐tip Optical waveguides
Online-Zugang:	Volltext
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