Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering

Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering

Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive manner. EUV scatterometry is investigated for the characterization of nanostructured surfaces and compared to grazing-inc...

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Veröffentlicht in:Optics express 2021-10, Vol.29 (22), p.35580-35591
Hauptverfasser: Herrero, Analía Fernández, Pflüger, Mika, Puls, Jana, Scholze, Frank, Soltwisch, Victor
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container_title Optics express
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creator Herrero, Analía Fernández
Pflüger, Mika
Puls, Jana
Scholze, Frank
Soltwisch, Victor
description Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive manner. EUV scatterometry is investigated for the characterization of nanostructured surfaces and compared to grazing-incidence small-angle X-ray scattering (GISAXS). The reconstruction is based on a rigorous simulation using a Maxwell solver based on finite-elements and is statistically validated with a Markov-Chain-Monte-Carlo sampling method. It is shown that in comparison to GISAXS, EUV allows to probe smaller areas and to reduce the computation times obtaining comparable uncertainties.
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title Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering
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