A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

An interferometric self-calibration method for the evaluation of the pitch deviation of scale grating has been extended to evaluate the pitch deviation of the long-range type linear scale by utilizing the stitching interferometry technique. Following the previous work, in which the interferometric s...

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Veröffentlicht in:	Sensors (Basel, Switzerland) Switzerland), 2021-11, Vol.21 (21), p.7412, Article 7412
Hauptverfasser:	Xiong, Xin, Shimizu, Yuki, Matsukuma, Hiraku, Gao, Wei
Format:	Artikel
Sprache:	eng
Schlagworte:	Algorithms Aperture Calibration Chemistry Chemistry, Analytical Deviation Engineering Engineering, Electrical & Electronic Error analysis Evaluation Instruments & Instrumentation Interferometry linear scale optical encoder Optical encoders Physical Sciences pitch deviation Science & Technology Self calibration Stitching stitching interferometry Technology
Online-Zugang:	Volltext
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