Orientation of the BSCCO films prepared by low-pressure single-aerosol source metallorganic chemical vapour deposition

Orientation of the BSCCO films prepared by low-pressure single-aerosol source metallorganic chemical vapour deposition

Thin films (0.7-0.8 micron) of Bi2Sr2CaCu2Ox were deposited by low-pressure metallorganic chemical vapour deposition with a single aerosol source. The influence of the deposition parameters on the orientation of the films was studied. It was established that low deposition rate, high deposition temp...

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Veröffentlicht in:Journal of materials science 1995-09, Vol.30 (17), p.4431-4434
Hauptverfasser: FUFLYIGIN, V. N, KAUL, A. R, POZIGUN, S. A, KLIPPE, L, WAHL, G
Format: Artikel
Sprache:eng
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Zusammenfassung:Thin films (0.7-0.8 micron) of Bi2Sr2CaCu2Ox were deposited by low-pressure metallorganic chemical vapour deposition with a single aerosol source. The influence of the deposition parameters on the orientation of the films was studied. It was established that low deposition rate, high deposition temperature and the presence of the liquid phase resulted in films with predominant c-orientation. 9 refs.
ISSN:0022-2461
1573-4803
DOI:10.1007/BF00361528