Computer aided design software for designing phase-shifting masks

Computer aided design software has been developed in order to improve the efficiency of completing the design of Levenson-type phase-shifting masks. The software assists designers with the functions of automatic shifter arrangement and verification. In addition, to cope with contradictory spots wher...

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Veröffentlicht in:	JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP 1993-12, Vol.32 (12B), p.5887-5891
Hauptverfasser:	OOI, K, HARA, S, KOYAMA, K
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Design. Technologies. Operation analysis. Testing Electronics Exact sciences and technology Integrated circuits Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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