New method of ultra-thin film characterization applied to the investigation of C/Ni/C structures under heat load

A new technique for measuring the thickness and density of ultra-thin films has been developed. Films of the order of tens of angstroms have been studied by using a combination of X-ray standing waves generated in layered synthetic microstructures (LSM) and near-total external fluorescence study. Th...

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Veröffentlicht in:Thin solid films 1995-04, Vol.259 (2), p.131-138
Hauptverfasser: Zheludeva, S.I., Kovalchuk, M.V., Novikova, N.N., Sosphenov, A.N., Malysheva, N.E., Salashenko, N.N., Akhsakhalyan, A.D., Platonov, Yu.Yu, Cernik, R.I., Collins, S.P.
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Sprache:eng
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Zusammenfassung:A new technique for measuring the thickness and density of ultra-thin films has been developed. Films of the order of tens of angstroms have been studied by using a combination of X-ray standing waves generated in layered synthetic microstructures (LSM) and near-total external fluorescence study. The technique has been used to study C/Ni/C trilayers (deposited on Cr/C and W/C LSM) under heat load. It was found that variation on Ni and C layer parameters at elevated temperatures is affected primarily by the deposition conditions.
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(94)06428-8