New method of ultra-thin film characterization applied to the investigation of C/Ni/C structures under heat load
A new technique for measuring the thickness and density of ultra-thin films has been developed. Films of the order of tens of angstroms have been studied by using a combination of X-ray standing waves generated in layered synthetic microstructures (LSM) and near-total external fluorescence study. Th...
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Veröffentlicht in: | Thin solid films 1995-04, Vol.259 (2), p.131-138 |
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Hauptverfasser: | , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | A new technique for measuring the thickness and density of ultra-thin films has been developed. Films of the order of tens of angstroms have been studied by using a combination of X-ray standing waves generated in layered synthetic microstructures (LSM) and near-total external fluorescence study. The technique has been used to study C/Ni/C trilayers (deposited on Cr/C and W/C LSM) under heat load. It was found that variation on Ni and C layer parameters at elevated temperatures is affected primarily by the deposition conditions. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/0040-6090(94)06428-8 |