Thickness and conductivity of metallic layers from eddy current measurements

A robust method that uses eddy current measurements to determine the conductivity and thickness of uniform conductive layers is described. The method was tested by estimating the conductivity and thickness of aluminum and copper layers on various substrate metals, and the thickness and conductivity...

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Veröffentlicht in:	Review of scientific instruments 1992-06, Vol.63 (6), p.3455-3465
Hauptverfasser:	Moulder, John C., Uzal, Erol, Rose, James H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Exact sciences and technology Other topics in electronic structure and electrical properties of surfaces, interfaces, and thin films Physics
Online-Zugang:	Volltext
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