Structure of vapor-deposited yttria and zirconia thin films

The structures of thin films of zirconia and yttria, deposited by electron beam evaporation, have been examined by X-ray absorption fine structure (XAFS) analysis. It was found that the structure of the yttria film was similar to that of bulk yttria, which is a cubic oxide phase. The zirconia film,...

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Veröffentlicht in:	Thin solid films 1992-09, Vol.217 (1), p.113-119
Hauptverfasser:	Long, G.G., Black, D.R., Feldman, A., Farabaugh, E.N., Spal, R.D., Tanaka, D.K., Zhang, Z.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Solid surfaces and solid-solid interfaces Surface and interface dynamics and vibrations Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
Online-Zugang:	Volltext
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