Optical method for simultaneous thickness measurements of two layers with a significant thickness difference
In this study, an optical method that allows simultaneous thickness measurements of two different layers distributed over a broad thickness range from several tens of nanometers to a few millimeters based on the integration of a spectroscopic reflectometer and a spectral-domain interferometer is pro...
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| Veröffentlicht in: | Optics express 2021-09, Vol.29 (20), p.31615-31631 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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