Morphology of electrochemical vapor deposited yttria-stabilized zirconia thin films
Yttria-stabilized zirconia films were deposited over alumina substrates by electrochemical vapor deposition (EVD). It was observed that the films grew with the same yttrium-to-zircomium ratio as in the reactant gases. Films deposited at temperatures of 1075°C or below have a highly faceted surface a...
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Veröffentlicht in: | Solid state ionics 1990-01, Vol.37 (2), p.197-202 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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