Spalling‐Induced Liftoff and Transfer of Electronic Films Using a van der Waals Release Layer

Heterogeneous integration strategies are increasingly being employed to achieve more compact and capable electronics systems for multiple applications including space, electric vehicles, and wearable and medical devices. To enable new integration strategies, the growth and transfer of thin electroni...

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Veröffentlicht in:	Small (Weinheim an der Bergstrasse, Germany) Germany), 2021-10, Vol.17 (42), p.e2102668-n/a
Hauptverfasser:	Blanton, Eric W., Motala, Michael J., Prusnick, Timothy A., Hilton, Albert, Brown, Jeff L., Bhattacharyya, Arkka, Krishnamoorthy, Sriram, Leedy, Kevin, Glavin, Nicholas R., Snure, Michael
Format:	Artikel
Sprache:	eng
Schlagworte:	Boron nitride Bowing Electric vehicles HEMTs heterogeneous integration Medical equipment Metal oxides Nanotechnology Residual stress Sapphire Spalling Substrates Thin films Two dimensional materials van der Waals release layers
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