Laser chemical vapour deposition of thin aluminium coatings

Laser chemical vapour deposition has recently become an attractive area of research. A maskless configuration of aluminium has been grown utilizing visible light from a copper laser which induces pyrolytical decomposition of trimethylaluminium (TMA). The process was carried out in vacuum or argon an...

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Veröffentlicht in:	Thin solid films 1992-01, Vol.207 (1), p.71-74
Hauptverfasser:	Shanov, V., Ivanov, B., Popov, C.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Metals. Metallurgy Physical properties of thin films, nonelectronic Physics Solid surfaces and solid-solid interfaces Surface energy thermodynamic properties Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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