Laser chemical vapor deposition of cobalt thin films

Smooth cobalt thin films have been deposited by decomposing dicobalt octacarbonyl [Co2(CO)8] with 248 nm excimer laser radiation. Area selective deposition has been achieved by imaging a mask onto soda-lime glass and Suprasil quartz substrates. The decomposition has been found to be partially due to...

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Veröffentlicht in:	Journal of applied physics 1992-10, Vol.72 (8), p.3480-3484
Hauptverfasser:	SCHULMEISTER, K, LUNNEY, J. G, BUCKLEY, B
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Metals. Metallurgy Physics Solid surfaces and solid-solid interfaces Surface and interface dynamics and vibrations Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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