Dependence of structural, electrical and optical properties of undoped indium oxide films on thickness
For highly conducting transparent films, thickness is an important parameter. This investigation optimizes the film thickness to obtain high electrical conductivity without appreciably affecting the transparency. Undoped Indium oxide films having different thickness have been deposited on Corning gl...
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Veröffentlicht in: | Materials research bulletin 1992, Vol.27 (9), p.1133-1138 |
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creator | Mirzapour, S. Rozati, S.M. Takwale, M.G. Marathe, B.R. Bhide, V.G. |
description | For highly conducting transparent films, thickness is an important parameter. This investigation optimizes the film thickness to obtain high electrical conductivity without appreciably affecting the transparency. Undoped Indium oxide films having different thickness have been deposited on Corning glass (7059) by using the spray pyrolysis technique. Study of the structural, electrical and optical properties of these films reveals that the mobility increases as the film thickness increases till its value is 6500 A° after which the mobility decreases. This behaviour of the mobility is closely related to the crystallinity of the films. A high value of mobility of 53 cm
2V
−1s
−1 has been achieved. The variation in the number of charge carriers with thickness is small. At 6500 A° the lowest value of resistivity obtained is
9.3 × 10
−4щ
cm
and the visible transmission is 82 %.
Another interesting feature of this work is the improvement in both electrical and optical film properties for the thickest film (1.03 μm) when the substrate temperature is increased from 425°C to 475°C. |
doi_str_mv | 10.1016/0025-5408(92)90253-V |
format | Article |
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2V
−1s
−1 has been achieved. The variation in the number of charge carriers with thickness is small. At 6500 A° the lowest value of resistivity obtained is
9.3 × 10
−4щ
cm
and the visible transmission is 82 %.
Another interesting feature of this work is the improvement in both electrical and optical film properties for the thickest film (1.03 μm) when the substrate temperature is increased from 425°C to 475°C.</description><identifier>ISSN: 0025-5408</identifier><identifier>EISSN: 1873-4227</identifier><identifier>DOI: 10.1016/0025-5408(92)90253-V</identifier><identifier>CODEN: MRBUAC</identifier><language>eng</language><publisher>London: Elsevier Ltd</publisher><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures ; Electronic transport phenomena in thin films and low-dimensional structures ; Exact sciences and technology ; Physics</subject><ispartof>Materials research bulletin, 1992, Vol.27 (9), p.1133-1138</ispartof><rights>1992</rights><rights>1992 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c364t-2ead8e5e7a9d8473d77cbc56b1e4e8a59ebd90155d05d9dd35f30097d91977b83</citedby><cites>FETCH-LOGICAL-c364t-2ead8e5e7a9d8473d77cbc56b1e4e8a59ebd90155d05d9dd35f30097d91977b83</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/0025-5408(92)90253-V$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,780,784,3550,4024,27923,27924,27925,45995</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=5604014$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Mirzapour, S.</creatorcontrib><creatorcontrib>Rozati, S.M.</creatorcontrib><creatorcontrib>Takwale, M.G.</creatorcontrib><creatorcontrib>Marathe, B.R.</creatorcontrib><creatorcontrib>Bhide, V.G.</creatorcontrib><title>Dependence of structural, electrical and optical properties of undoped indium oxide films on thickness</title><title>Materials research bulletin</title><description>For highly conducting transparent films, thickness is an important parameter. This investigation optimizes the film thickness to obtain high electrical conductivity without appreciably affecting the transparency. Undoped Indium oxide films having different thickness have been deposited on Corning glass (7059) by using the spray pyrolysis technique. Study of the structural, electrical and optical properties of these films reveals that the mobility increases as the film thickness increases till its value is 6500 A° after which the mobility decreases. This behaviour of the mobility is closely related to the crystallinity of the films. A high value of mobility of 53 cm
2V
−1s
−1 has been achieved. The variation in the number of charge carriers with thickness is small. At 6500 A° the lowest value of resistivity obtained is
9.3 × 10
−4щ
cm
and the visible transmission is 82 %.
Another interesting feature of this work is the improvement in both electrical and optical film properties for the thickest film (1.03 μm) when the substrate temperature is increased from 425°C to 475°C.</description><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures</subject><subject>Electronic transport phenomena in thin films and low-dimensional structures</subject><subject>Exact sciences and technology</subject><subject>Physics</subject><issn>0025-5408</issn><issn>1873-4227</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1992</creationdate><recordtype>article</recordtype><recordid>eNp9kMFO3DAQhi3USl22fYMefEAIJFLsxI7jCxLalrbSSlxgr5bXMxFus06wEwRvX2cX7bEnezTfP_Z8hHzl7BtnvL5mrJSFFKy50OWlzkVVbE7IgjeqKkRZqg9kcUQ-kdOU_jDGRKPUgrTfccAAGBzSvqVpjJMbp2i7K4odujF6ZztqA9B-GPf3IfYDxtFjmgNTgFwC9QH8tKP9qwekre92uRvo-OTd34ApfSYfW9sl_PJ-Lsnj3Y-H1a9iff_z9-p2XbiqFmNRooUGJSqroRGqAqXc1sl6y1FgY6XGLWjGpQQmQQNUsq0Y0wo010ptm2pJzg9z8y-fJ0yj2fnksOtswH5KppR1NlZWGRQH0MU-pYitGaLf2fhmODOzVDMbM7Mxo0uzl2o2OXb2Pt-mLKONNjifjllZM8G4yNjNAcO864vHaJLzs2PwMUs10Pv_v_MPOBaMsg</recordid><startdate>1992</startdate><enddate>1992</enddate><creator>Mirzapour, S.</creator><creator>Rozati, S.M.</creator><creator>Takwale, M.G.</creator><creator>Marathe, B.R.</creator><creator>Bhide, V.G.</creator><general>Elsevier Ltd</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>7SP</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>1992</creationdate><title>Dependence of structural, electrical and optical properties of undoped indium oxide films on thickness</title><author>Mirzapour, S. ; Rozati, S.M. ; Takwale, M.G. ; Marathe, B.R. ; Bhide, V.G.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c364t-2ead8e5e7a9d8473d77cbc56b1e4e8a59ebd90155d05d9dd35f30097d91977b83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1992</creationdate><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures</topic><topic>Electronic transport phenomena in thin films and low-dimensional structures</topic><topic>Exact sciences and technology</topic><topic>Physics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Mirzapour, S.</creatorcontrib><creatorcontrib>Rozati, S.M.</creatorcontrib><creatorcontrib>Takwale, M.G.</creatorcontrib><creatorcontrib>Marathe, B.R.</creatorcontrib><creatorcontrib>Bhide, V.G.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Materials research bulletin</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Mirzapour, S.</au><au>Rozati, S.M.</au><au>Takwale, M.G.</au><au>Marathe, B.R.</au><au>Bhide, V.G.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Dependence of structural, electrical and optical properties of undoped indium oxide films on thickness</atitle><jtitle>Materials research bulletin</jtitle><date>1992</date><risdate>1992</risdate><volume>27</volume><issue>9</issue><spage>1133</spage><epage>1138</epage><pages>1133-1138</pages><issn>0025-5408</issn><eissn>1873-4227</eissn><coden>MRBUAC</coden><abstract>For highly conducting transparent films, thickness is an important parameter. This investigation optimizes the film thickness to obtain high electrical conductivity without appreciably affecting the transparency. Undoped Indium oxide films having different thickness have been deposited on Corning glass (7059) by using the spray pyrolysis technique. Study of the structural, electrical and optical properties of these films reveals that the mobility increases as the film thickness increases till its value is 6500 A° after which the mobility decreases. This behaviour of the mobility is closely related to the crystallinity of the films. A high value of mobility of 53 cm
2V
−1s
−1 has been achieved. The variation in the number of charge carriers with thickness is small. At 6500 A° the lowest value of resistivity obtained is
9.3 × 10
−4щ
cm
and the visible transmission is 82 %.
Another interesting feature of this work is the improvement in both electrical and optical film properties for the thickest film (1.03 μm) when the substrate temperature is increased from 425°C to 475°C.</abstract><cop>London</cop><cop>Amsterdam</cop><pub>Elsevier Ltd</pub><doi>10.1016/0025-5408(92)90253-V</doi><tpages>6</tpages></addata></record> |
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subjects | Condensed matter: electronic structure, electrical, magnetic, and optical properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport phenomena in thin films and low-dimensional structures Exact sciences and technology Physics |
title | Dependence of structural, electrical and optical properties of undoped indium oxide films on thickness |
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