Evaluation of some mechanical properties of SiC films deposited on steel by plasma-assisted chemical vapour deposition from tetramethylsilane

Deposits of SiC with various Si:C atomic ratios were obtained. The growth rates are high and their variations are explained in terms of competition between different mechanisms. The hardness and adherence measured by scratch testing are a strong function of the coating composition. Hardness values a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Surface & coatings technology 1991-11, Vol.48 (2), p.121-129
Hauptverfasser:	Lelogeais, M., Ducarroir, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Metals. Metallurgy Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!