Superconducting Properties of Y-Ba-Cu-O Thin Films Prepared by RF Magnetron Sputtering with a Grid Electrode
Y-Ba-Cu-O thin films were prepared by an RF sputtering method with a DC-biased grid electrode inserted between a target and a substrate. When the grid was negatively biased at about -70 V, as-sputtered superconducting films with a c -axis orientation were obtained, while the films prepared without t...
Gespeichert in:
| Veröffentlicht in: | Japanese Journal of Applied Physics 1989-03, Vol.28 (3A), p.L434-L436 |
|---|---|
| Hauptverfasser: | , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | L436 |
|---|---|
| container_issue | 3A |
| container_start_page | L434 |
| container_title | Japanese Journal of Applied Physics |
| container_volume | 28 |
| creator | Takechi, Kazushige Shiota, Tetsuyoshi Hatou, Tsunehiro Inoue, Masumi Takai, Yoshiaki Hayakawa, Hisao Ohbayashi, Kazushige |
| description | Y-Ba-Cu-O thin films were prepared by an RF sputtering method with a DC-biased grid electrode inserted between a target and a substrate. When the grid was negatively biased at about -70 V, as-sputtered superconducting films with a
c
-axis orientation were obtained, while the films prepared without the grid electrode but under the same condition showed neither superconductivity nor
c
-axis crystal orientation. |
| doi_str_mv | 10.1143/JJAP.28.L434 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_25461969</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>25461969</sourcerecordid><originalsourceid>FETCH-LOGICAL-c293t-709188c68cf73ea73d2c3ef5bb224f7ec90916da7169c724f3a9e9f9742226703</originalsourceid><addsrcrecordid>eNotkM9PwjAYhhujiYje_AN68uRw_bF2PSIRlGAgggdPTem-Qc3YZtvF8N87gqcv3_s-eQ8PQvckHRHC2dN8Pl6NaD5acMYv0IAwLhOeiuwSDdKUkoQrSq_RTQjf_SsyTgaoWncteNvURWejq3d45Zs-iA4Cbkr8lTybZNIlS7zZuxpPXXUIPQKt8VDg7RF_TPG72dUQfVPjddvFCP408-viHhs8867ALxXYvi_gFl2Vpgpw93-H6HP6spm8Jovl7G0yXiSWKhYTmSqS51bktpQMjGQFtQzKbLullJcSrOoBURhJhLKyj5hRoEolOaVUyJQN0cN5t_XNTwch6oMLFqrK1NB0QdOMC6KE6sHHM2h9E4KHUrfeHYw_apLqk1J9Uqpprk9K2R_lt2kE</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>25461969</pqid></control><display><type>article</type><title>Superconducting Properties of Y-Ba-Cu-O Thin Films Prepared by RF Magnetron Sputtering with a Grid Electrode</title><source>Institute of Physics Journals</source><creator>Takechi, Kazushige ; Shiota, Tetsuyoshi ; Hatou, Tsunehiro ; Inoue, Masumi ; Takai, Yoshiaki ; Hayakawa, Hisao ; Ohbayashi, Kazushige</creator><creatorcontrib>Takechi, Kazushige ; Shiota, Tetsuyoshi ; Hatou, Tsunehiro ; Inoue, Masumi ; Takai, Yoshiaki ; Hayakawa, Hisao ; Ohbayashi, Kazushige</creatorcontrib><description>Y-Ba-Cu-O thin films were prepared by an RF sputtering method with a DC-biased grid electrode inserted between a target and a substrate. When the grid was negatively biased at about -70 V, as-sputtered superconducting films with a
c
-axis orientation were obtained, while the films prepared without the grid electrode but under the same condition showed neither superconductivity nor
c
-axis crystal orientation.</description><identifier>ISSN: 0021-4922</identifier><identifier>EISSN: 1347-4065</identifier><identifier>DOI: 10.1143/JJAP.28.L434</identifier><language>eng</language><ispartof>Japanese Journal of Applied Physics, 1989-03, Vol.28 (3A), p.L434-L436</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c293t-709188c68cf73ea73d2c3ef5bb224f7ec90916da7169c724f3a9e9f9742226703</citedby><cites>FETCH-LOGICAL-c293t-709188c68cf73ea73d2c3ef5bb224f7ec90916da7169c724f3a9e9f9742226703</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids></links><search><creatorcontrib>Takechi, Kazushige</creatorcontrib><creatorcontrib>Shiota, Tetsuyoshi</creatorcontrib><creatorcontrib>Hatou, Tsunehiro</creatorcontrib><creatorcontrib>Inoue, Masumi</creatorcontrib><creatorcontrib>Takai, Yoshiaki</creatorcontrib><creatorcontrib>Hayakawa, Hisao</creatorcontrib><creatorcontrib>Ohbayashi, Kazushige</creatorcontrib><title>Superconducting Properties of Y-Ba-Cu-O Thin Films Prepared by RF Magnetron Sputtering with a Grid Electrode</title><title>Japanese Journal of Applied Physics</title><description>Y-Ba-Cu-O thin films were prepared by an RF sputtering method with a DC-biased grid electrode inserted between a target and a substrate. When the grid was negatively biased at about -70 V, as-sputtered superconducting films with a
c
-axis orientation were obtained, while the films prepared without the grid electrode but under the same condition showed neither superconductivity nor
c
-axis crystal orientation.</description><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1989</creationdate><recordtype>article</recordtype><recordid>eNotkM9PwjAYhhujiYje_AN68uRw_bF2PSIRlGAgggdPTem-Qc3YZtvF8N87gqcv3_s-eQ8PQvckHRHC2dN8Pl6NaD5acMYv0IAwLhOeiuwSDdKUkoQrSq_RTQjf_SsyTgaoWncteNvURWejq3d45Zs-iA4Cbkr8lTybZNIlS7zZuxpPXXUIPQKt8VDg7RF_TPG72dUQfVPjddvFCP408-viHhs8867ALxXYvi_gFl2Vpgpw93-H6HP6spm8Jovl7G0yXiSWKhYTmSqS51bktpQMjGQFtQzKbLullJcSrOoBURhJhLKyj5hRoEolOaVUyJQN0cN5t_XNTwch6oMLFqrK1NB0QdOMC6KE6sHHM2h9E4KHUrfeHYw_apLqk1J9Uqpprk9K2R_lt2kE</recordid><startdate>19890301</startdate><enddate>19890301</enddate><creator>Takechi, Kazushige</creator><creator>Shiota, Tetsuyoshi</creator><creator>Hatou, Tsunehiro</creator><creator>Inoue, Masumi</creator><creator>Takai, Yoshiaki</creator><creator>Hayakawa, Hisao</creator><creator>Ohbayashi, Kazushige</creator><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>19890301</creationdate><title>Superconducting Properties of Y-Ba-Cu-O Thin Films Prepared by RF Magnetron Sputtering with a Grid Electrode</title><author>Takechi, Kazushige ; Shiota, Tetsuyoshi ; Hatou, Tsunehiro ; Inoue, Masumi ; Takai, Yoshiaki ; Hayakawa, Hisao ; Ohbayashi, Kazushige</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c293t-709188c68cf73ea73d2c3ef5bb224f7ec90916da7169c724f3a9e9f9742226703</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1989</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Takechi, Kazushige</creatorcontrib><creatorcontrib>Shiota, Tetsuyoshi</creatorcontrib><creatorcontrib>Hatou, Tsunehiro</creatorcontrib><creatorcontrib>Inoue, Masumi</creatorcontrib><creatorcontrib>Takai, Yoshiaki</creatorcontrib><creatorcontrib>Hayakawa, Hisao</creatorcontrib><creatorcontrib>Ohbayashi, Kazushige</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Japanese Journal of Applied Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Takechi, Kazushige</au><au>Shiota, Tetsuyoshi</au><au>Hatou, Tsunehiro</au><au>Inoue, Masumi</au><au>Takai, Yoshiaki</au><au>Hayakawa, Hisao</au><au>Ohbayashi, Kazushige</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Superconducting Properties of Y-Ba-Cu-O Thin Films Prepared by RF Magnetron Sputtering with a Grid Electrode</atitle><jtitle>Japanese Journal of Applied Physics</jtitle><date>1989-03-01</date><risdate>1989</risdate><volume>28</volume><issue>3A</issue><spage>L434</spage><epage>L436</epage><pages>L434-L436</pages><issn>0021-4922</issn><eissn>1347-4065</eissn><abstract>Y-Ba-Cu-O thin films were prepared by an RF sputtering method with a DC-biased grid electrode inserted between a target and a substrate. When the grid was negatively biased at about -70 V, as-sputtered superconducting films with a
c
-axis orientation were obtained, while the films prepared without the grid electrode but under the same condition showed neither superconductivity nor
c
-axis crystal orientation.</abstract><doi>10.1143/JJAP.28.L434</doi></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0021-4922 |
| ispartof | Japanese Journal of Applied Physics, 1989-03, Vol.28 (3A), p.L434-L436 |
| issn | 0021-4922 1347-4065 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_25461969 |
| source | Institute of Physics Journals |
| title | Superconducting Properties of Y-Ba-Cu-O Thin Films Prepared by RF Magnetron Sputtering with a Grid Electrode |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-20T22%3A50%3A26IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Superconducting%20Properties%20of%20Y-Ba-Cu-O%20Thin%20Films%20Prepared%20by%20RF%20Magnetron%20Sputtering%20with%20a%20Grid%20Electrode&rft.jtitle=Japanese%20Journal%20of%20Applied%20Physics&rft.au=Takechi,%20Kazushige&rft.date=1989-03-01&rft.volume=28&rft.issue=3A&rft.spage=L434&rft.epage=L436&rft.pages=L434-L436&rft.issn=0021-4922&rft.eissn=1347-4065&rft_id=info:doi/10.1143/JJAP.28.L434&rft_dat=%3Cproquest_cross%3E25461969%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=25461969&rft_id=info:pmid/&rfr_iscdi=true |