Preparation of dispersed phase ceramic boron nitride and aluminum composite coatings by chemical vapor deposition

Preparation of dispersed phase ceramic boron nitride and aluminum composite coatings by chemical vapor deposition

BN+AlN coatings were deposited on Al#72O#73 from the BCl#73-AlCl#73-NH#73 reagent system at 700#8#.1200#+C. The composite coatings consisted of very small BN and AlN regions which were either crystalline or amorphous, depending on deposition temp. and reagent concentrations. For example, a composite...

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Veröffentlicht in:Journal of the American Ceramic Society 1991-01, Vol.74 (9), p.2136-2140
Hauptverfasser: Lee, Woo Y, Lackey, W J, Freeman, Garth B
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container_issue 9
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container_title Journal of the American Ceramic Society
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creator Lee, Woo Y
Lackey, W J
Freeman, Garth B
description BN+AlN coatings were deposited on Al#72O#73 from the BCl#73-AlCl#73-NH#73 reagent system at 700#8#.1200#+C. The composite coatings consisted of very small BN and AlN regions which were either crystalline or amorphous, depending on deposition temp. and reagent concentrations. For example, a composite containing AlN whiskers of A100 nm diam. in a matrix of turbostratic BN of 2 nm grain size was deposited at 1100#+ and 20 kPa.
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title Preparation of dispersed phase ceramic boron nitride and aluminum composite coatings by chemical vapor deposition
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